Gas injection system


The GIS-EM is a gas injection plug-in system for the MM3A-EM micromanipulator. It enhances your system by allowing you to inject various gases into the SEM chamber.

The unique combination of precision manipulation allows safe and controlled injection of media from solid or liquid precursors. The precursors are placed inside the temperature controlled reservoir where they evaporate when heated.

It is also possible to inject gaseous precursors such as Argon, e.g. for charge compensation.

Minute amounts of gas are released in precise doses using the proportional valve which is in turn actuated by a Nanomotor®.

The plug-in tool can be quickly and easily retrofitted to your existing MM3A-EM micromanipulator.


Nanomotor® is a registered trademark of Kleindiek Nanotechnik GmbH, Reutlingen and Klocke Nanotechnik GmbH, Aachen