MM3A-EM Probe Station


The MM3A-EM Probe Station comprises up to eight MM3A-EM micromanipulators combined with our long range substage with 30 mm travel in X and Y. The substage can optionally be equipped with positional encoders yielding 50 nm repeatability. Another option is to add a Z axis with a range of 3 mm.

The entire platform can be mounted on the SEM's stage in a few short minutes and just as easily be removed in order to return the microscope to its previous state.

The MM3A-EM micromanipulators are equipped with low-current, low-capacity measurement capability and are fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.

The platform can also be fitted with a heating stage for temperatures of up to 450°C. Other customizations are available upon request (e,g, integrated LED illumination).