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About
About
EBIC Characterization System for EBAC, RCI, EBIV, EBIRCH and EBIC measurements:
We have designed an easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with virtually all commercially available SEM's and FIB's. The setup consists of two MM3A-EM micromanipulators, at least one of which is equipped with a low-current measurement kit (LCMK-EM) and a signal amplifier. The amplifier's output is connected to the microscope's video input. The recorded signals are amplified and fed back to the microscope thus generating a greyscale map of current in the scanned area. This eliminates the need for additional scan generators and greatly enhances the system's ease-of-use. The acquired data can be superimposed on images generated by the SEM's detectors. This can be achieved within the SEMs control interface or with the included OverlayTool software.
Primary applications are open detection in integrated circuits, visualization of p-n junctions and localization of resistivity changes in via chains.
Though mainly used for semiconductor failure analysis, this tool can be used for any application that requires accurate measurement of low currents. It can be quickly and easily added to your existing MM3A-EM micromanipulator system.
Specifications (click to expand)
Specifications (click to expand)
Overview
Overview
Current measurement limit: 15 fA
Gain: 105 to 1012 V/A
Current leakage: < 50 fA/V
Video output: 1 V / 50 Ω
External voltage input (triax)
Large offset range
AC and DC amplification modes
Image inversion mode
Individual and summed signals are possible
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
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