The MM3A-LMP micromanipulator is an economical and flexible alternative to conventional semiconductor probing instruments. Electrical measurements require probers to have low drift, high precision, a large working range and also to be insensitive to environmental conditions.
The MM3A-LMP outshines conventional probers in all these aspects. It is designed for measurements on 45 nm, 65 nm, 90 nm and larger technology and it offers unsurpassed stability, extreme precision and the flexibility to allow you to create your own prober station.
Length: 62.1 mm
Width: 20.4 mm
Height: 25.4 mm
Weight: 45 g
Operating range A & B: 220°
Operating range C: 12 mm
Speed A & B: up to 10 mm/s
Speed C: up to 2 mm/s
Resolution A: 7 nrad (0.5 nm)
Resolution B: 7 nrad (0.2 nm)
Resolution C: < 0.05 nm
Holding force: 1 N
Holding torque: 3 to 4 Nmm
Lift B: 5 g
Probing current range: 10 nA to 100 mA
Maximum probing voltage: 100 V
Probing signal resistance: 7.0 Ω
Temperature range: 273 K to 353 K
Lowest pressure: Not vacuum compatible
Mounting: Magnetic
Material: Stainless steel, aluminium
A = left / right B = up / down C = in / out
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Small and practical
Plug-and-play system with modular components
Interfacing solutions for most microscopes
Fast setup and removal
Effortless work with multiple manipulators
Useful plug-in tools
Result-oriented operation and increased throughput
Intuitive control interfaces and software
User-friendly and easy to learn
Quick and easy probe tip exchange
Compact, stand-alone electronics with PC interface
Pioneering cabling technology
Compact construction delivers higher resonance frequencies
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
No backlash or reversal play
Sub-nanometer resolution (0.25 nm)
Extensive working range (100 cm³)
No "blind axis" like with cartesian systems
Integrated coarse and fine displacement in one drive
High operating velocity (up to 10 mm/sec)
Coarse and fine displacement in one drive