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About
About
Based on the highly successful MM3A-EM micromanipulator, the MM3E exhibits the same compactness, precision, and stability combined with closed-loop positional feedback. This enhancement provides the means to improve the system’s ease of use (e.g. by defining parking and working positions that can be addressed at the click of a button).
The MM3E is fully compatible with virtually any SEM or FIB/SEM on the market. It comes with an intuitive, drag&drop-style control software which provides an easy means for positioning the tool tip in three dimensions inside your SEM or FIB/SEM tool.
The software performs coordinate transformations so that the MM3E behaves as a cartesian system with a reproducibility of a few micrometers. With the optional encoded axial rotation drive, the specimen can be rotated compucentrically in the vicinity of the sample.
Specifications (click to expand)
Specifications (click to expand)
Overview
Overview
Resolution A: 7 nrad (0.5 nm)
Resolution B: 7 nrad (0.2 nm)
Resolution C: 0.05 nmResolution R: < 60 nrad
Reproducibility XYZ: <2 µm
Drift: <1 nm/min
compucentric rotation field of view: ~30 µm
Probing current range: 10 nA to 100 mA
Maximum probing voltage: 100 V
Probing signal resistance: 7.0 Ω
Temperature range: 273 K to 353 K
Mounting: M4 tapped hole
A = left / right B = up / down C = in / out
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Advantages (click to expand)
Advantages (click to expand)
Compact & flexible
Compact & flexible
Small and practical
Plug-and-play system with modular components
Interfacing solutions for most SEM/FIB instruments
Fast setup and removal
Effortless work with multiple manipulators
Useful plug-in tools
Clear & simple
Clear & simple
Result-oriented operation and increased throughput
Intuitive control interfaces and software
User-friendly and easy to learn
Quick and easy probe tip exchange
Compact, stand-alone electronics with PC interface
Pioneering cabling technology
Robust & stable
Robust & stable
Compact construction delivers higher resonance frequencies
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
Fast & precise
Fast & precise
No backlash or reversal play
Sub-nanometer resolution (0.25 nm)
Extensive working range (100 cm³)
No "blind axis" like with cartesian systems
Integrated coarse and fine displacement in one drive
High operating velocity (up to 10 mm/sec)
Coarse and fine displacement in one drive
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