MM3A-EM @ Phenom

Overview

• Length: 62.1 mm

• Width: 20.4 mm

• Height: 25.4 mm

• Weight: 45 g

• Operating range A & B: 240°

• Operating range C: 12 mm

• Speed A & B: up to 10 mm/s

• Speed C: up to 2 mm/s

• Resolution A: 6.5 nrad (0.5 nm)

• Resolution B: 6.5 nrad (0.2 nm)

• Resolution C: < 0.05 nm

• Holding force: 1 N

• Holding torque: 3 to 4 Nmm

• Lift Y: 5 g

• Probing current range: 10 nA to 100 mA

• Maximum probing voltage: 100 V

• Probing signal resistance: 7.0 Ω

• Temperature range: 273 K to 353 K

• UHV version: 273 K to 393 K

• Low temp. version: 77 K to 393 K

• Lowest pressure: 10⁻⁷ mbar
  UHV version: 2 x 10-10 mbar

• Mounting: M4 tapped hole

• Material: Stainless steel, aluminium

A = left / right    B = up / down    C = in / out

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Compact and flexible

• Small and practical

• Plug-and-play system with modular components

• Fast setup and removal

• Useful plug-in tools

Clear and simple

• Result-oriented operation and increased throughput

• Intuitive control interfaces and software

• User-friendly and easy to learn

• Quick and easy tool exchange

• Compact, stand-alone electronics with PC interface

• Pioneering cabling technology

Robust and stable

• Compact construction delivers higher resonance frequencies

• Excellent stability

• Low drift (1 nm/min)

• Reliable operation (one year endurance test)

• Virtually insusceptible to vibrations

Fast and precise

• No backlash or reversal play

• Sub-nanometer resolution (0.25 nm)

• No "blind axis" like with cartesian systems

• Integrated coarse and fine displacement in one drive

• High operating velocity (up to 10 mm/sec)