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About
About
The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing. In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision - the MM4. The Prober Shuttle can be comprised of either two or four MM4s with the option of an ultra-flat two-axis or three-axis substage.
Due to limitations in the number of contacts available on the PhenomXL's vacuum feedthrough setup, a maximum of four micromanipulators can be driven in this setup. So, if the substage is required, only three probes can be used. Most users will be perfectly happy with a four-probe setup sans substage, though.
The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules.
Specifications (click to expand)
Specifications (click to expand)
Overview
Overview
Total height: 10 mm
Total width: 100 mm
Maximum sample area: 20 mm x 20 mm
Maximum sample height: 10 mm - depending on the sample area and load lock dimensions
Weight: 100 g + SEM/FIB dovetail
Clean cable management from flange to rack
Non-magnetic design
Ready for 5 nm and beyond
Next generation micromanipulators
A = left / right B = up / down C = in / outNext generation micromanipulators
Operating range: A = 9 mm, B = 90°, C = 5 mm
Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm
Low drift: 1 nm/min
Low-capacity, low-current measurements
Low-capacity, low-current measurements
Noise: 25 fA @ 1 Hz
Insulation leakage current: <50 fA/V
Signal conductor resistance: <5 Ω
Maximum voltage: 100 V
Maximum current: 100 mA
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
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