Prober Shuttle (PS4)

Overview

• Total height: 10 mm

• Total width: 100 mm

• Maximum sample area: 20 mm x 20 mm

• Maximum sample height: 10 mm - depending on the sample area and load lock dimensions

• Weight: 100 g + SEM/FIB dovetail

• Clean cable management from flange to rack

• Non-magnetic design

• Ready for 5 nm and beyond

Next generation micromanipulators

• Operating range: A = 9 mm, B = 90°, C = 5 mm

• Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm

• Low drift: 1 nm/min

Low-capacity, low-current measurements

• Noise: 25 fA @ 1 Hz

• Insulation leakage current: <50 fA/V

• Signal conductor resistance: <5 Ω

• Maximum voltage: 100 V

• Maximum current: 100 mA

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Compact & flexible

• Small and practical

• Plug-and-play system with modular components

• Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility)

• Fast setup and removal

• Pioneering cabling technology

• Non-magnetic design for use with immersion lenses

• Lightweight platform is simply placed on your SEMs sample stage

• Can be tilted to FIB angle e.g. for circuit edit or delayering applications

• Easy to retrofit to existing tools

Clear & simple

• Intuitive control interfaces and software

• User-friendly and easy to learn

• Quick and easy probe tip exchange

• Compact, stand-alone electronics

• Effortless work with multiple manipulators

Robust & stable

• Excellent stability

• Low drift (1 nm/min)

• Reliable operation (one year endurance test)

• Virtually insusceptible to vibrations

Fast & precise

• High operating velocity (up to 10 mm/sec)

• Sub-nanometer resolution (0.05 nm)

• No backlash or reversal play

• Extensive working range

• Coarse and fine displacement in one drive