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About
About
The PS8 Prober Shuttle is already the most compact and highly integrated nanoprobing system in the market. Nonetheless, we found a way to add positional encoders to the platform. This latest feature enables fast and efficient nanoprobing workflows.
The ability to automatically pre-align the probes is especially important for probing on the most recent technology nodes where beam sensitivity is an issue and thus, very low acceleration voltages are required. Using pre-defined alignment positions, all eight probes can be brought from their individual parked positions into close vicinity to each other at a consistent height above the sample - at the click of a button! This eliminates the tedious pre-alignment task which involved constant corrections of the astigmatism and/or necessitated switching to higher acceleration voltages.
The PS8e utilizes the MM4 ultra-flat three-axis manipulators that exhibit unmatched stability and precision. The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.
Specifications (click to expand)
Specifications (click to expand)
Overview
Overview
Total height: 10 mm
Total width: 140 mm
Maximum sample area: 20 mm x 20 mm
Maximum sample height: 20 mm - depending on the sample area and load lock dimensions
Weight: 200 g + SEM/FIB dovetail
Clean cable management from flange to rack
Non-magnetic design
Ready for 3 nm and beyond
Next generation micromanipulators
A = left / right B = up / down C = in / outNext generation micromanipulators
Operating range: A = 5 mm, B = 90°, C = 5 mm
Resolution: A < 0.05 nm, B < 0.5 nm, C < 0.05 nm
Low drift: 1 nm/min
Encoder features
Encoder features
Park & restore probes with a click of a button
Drive substage to pre-defined locations
Fast cycle time
Automatic tip pre-alignment allows lowkV workflows
Low-capacity, low-current measurements
Low-capacity, low-current measurements
Noise: 25 fA @ 1 Hz
Insulation leakage current: <50 fA/V
Signal conductor resistance: <5 Ω
Maximum voltage: 100 V
Maximum current: 100 mA
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Advantages (click to expand)
Advantages (click to expand)
Compact & flexible
Compact & flexible
Small and practical
Plug-and-play system with modular components
Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility)
Fast setup and removal
Pioneering cabling technology
Non-magnetic design for use with immersion lenses
Lightweight platform is simply placed on your SEMs sample stage
Can be tilted to FIB angle e.g. for circuit edit or delayering applications
Easy to retrofit to existing tools
Clear & simple
Clear & simple
Intuitive control interfaces and software
User-friendly and easy to learn
Quick and easy probe tip exchange
Compact, stand-alone electronics
Effortless work with multiple manipulators
Robust & stable
Robust & stable
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast & precise
Fast & precise
High operating velocity (up to 10 mm/sec)
Sub-nanometer resolution (0.05 nm)
No backlash or reversal play
Extensive working range
Coarse and fine displacement in one drive
Fast pre-positioning at the click of a button
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