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About
About
The MM3A-EM Probe Station comprises up to eight MM3A-EM micromanipulators combined with our long range substage with 30 mm travel in X and Y. The substage can optionally be equipped with positional encoders yielding 50 nm repeatability. Another option is to add a Z axis with a range of 3 mm.
The entire platform can be mounted on the SEM's stage in a few short minutes and just as easily be removed in order to return the microscope to its previous state.
The MM3A-EM micromanipulators are equipped with low-current, low-capacity measurement capability and are fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.
The platform can also be fitted with a heating stage for temperatures of up to 450°C. Other customizations are available upon request (e,g, integrated LED illumination).
Specifications (click to expand)
Specifications (click to expand)
Overview
Overview
Total height: 31 mm
Total width: 180 mm
Maximum sample size: 70 mm — 70 mm, max 10 mm height
Weight: ~1200 g
Three-axis micromanipulators
A = left / right B = up / down C = in / outThree-axis micromanipulators
Operating range: A = 240°, B = 240°, C = 12 mm
Resolution A: 7 nrad (0.5 nm)
Resolution B: 7 nrad (0.2 nm)
Resolution C: < 0.05 nm
Low drift: 1 nm/min
Low-capacity, low-current measurements
Low-capacity, low-current measurements
Noise: 25 fA @ 1 Hz
Insulation leakage current: <50 fA/V
Signal conductor resistance: <5 Ω
Maximum voltage: 100 V
Maximum current: 100 mA
Substage
Substage
Travel X and Y: 28.5 mm
Speed: up to 2 mm/s
Resolution: < 0.5 nm
Repeatability: 50 nm (optional)
Angular deviation: < 1 µrad
Load: 500 g
Optional Z-drive range: 3 mm
Z Lift capability: 25 g
Sample mounting: Clip or 2 x M3 holes
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Advantages (click to expand)
Advantages (click to expand)
Compact & flexible
Compact & flexible
Easy to install and remove for a high degree of flexibility
Plug-and-play system with modular components
Interfacing solutions for most SEM/FIB instruments
Fast setup
Ample space for large samples
Large working range (30 mm x 30 mm substage travel)
Pioneering cabling technology
Clear & simple
Clear & simple
Intuitive control interfaces and software
User-friendly and easy to learn
Quick and easy probe tip exchange
Compact, stand-alone electronics
Effortless work with multiple manipulators
Robust & stable
Robust & stable
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
Fast & precise
Fast & precise
High operating velocity (up to 10 mm/sec)
Sub-nanometer resolution (0.25 nm)
No backlash or reversal play
Extensive working range
Coarse and fine displacement in one drive
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