6-Axis Alignment Stage

Overview

• Dimensions: Length 68 mm - Width 68 mm - Height 65 mm

• Travel: X1 and Y1 = 20 mm

• Travel: Z1 = 15 mm

• Travel: X2 and Y2 = 10 mm

• Travel: Z2 = 7 mm

• Resolution: Linear axes < 0.05 nm

• Encoder repeatability (X1/Y1): 100 nm*

• Speed: up to 1 mm/s

• Cartesian movement

• Drift < 1.5 nm/min

• No backlash or reversal play

• Coarse and fine displacement in one drive

• Virtually insusceptible to vibrations

* Repeatability depends on the working distance from the encoder due to the angular deviation of the substage.
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.