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About
About
The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position. The system consists of a small four-axis substage mounted on a tilting platform. The substage offers a range of 10 mm by 10 mm in the X and Y directions and 3 mm in the Z direction. Additionally, the rotational axis allows unlimited rotation of the sample through 360 deg. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg.
Specifications (click to expand)
Specifications (click to expand)
Overview
Overview
Dimensions: Length 72 mm - Width 50 mm - Height 44 mm
Travel: X and Y = 10 mm
Travel: Z = 3 mm
Travel: R = 360 deg (unlimited) - optionally with encoder
Travel: T = ± 90 deg, with encoder
Absolute accuracy: T < 0.4 deg (7 mrad)
Absolute accuracy: R < 0.4 deg (7 mrad), if R-encoder is configured
Repeatablity: T < 0.03 deg (0.4 µrad)
Resolution: Linear axes < 0.05 nm
Resolution: Rotational axes < 0.4 µdeg (6.5 nrad)
Speed: up to 1 mm/s
Cartesian movement
Drift < 1.5 nm/min
No backlash or reversal play
Coarse and fine displacement in one drive
Virtually insusceptible to vibrations
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Applications (click to expand)
Applications (click to expand)
Electron Channel Contrast Imaging (ECCI)
Electron Backscatter Diffraction (EBSD)
Tomography
... any application that requires eucentric repositioning of samples
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