Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.
The LT14030 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical alternative to laser interferometer stages.
It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation. The stage is also available in open loop and laser interferometer versions, depending on the application.
Optional software for three-point alignment is available as well as an optional Z axis.
Length: 141 mm
Width: 133 mm
Height: 21 mm
Weight: 420 g
Travel X and Y: 30 mm
Travel (optional) Z axis: 5 mm
Speed: up to 1 mm/s
Smallest Step size: < 0.02 nm
Reproducibility: 100 nm
Measurement resolution: 50 nm
Angular deviation: < 10 µrad
Load: 500 g
Temperature range: 273 K to 353 K
Lowest pressure: 10⁻⁷ mbar
Substage mounting: 3 x 3.2 mm holes
During operation, the stage will heat up to approx. 55°C
A version of the stage employing laser interferometers is also available
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Small and practical
Plug-and-play system with modular components
Interfacing solutions for most microscopes
Fast setup and removal
Result-oriented operation and increased throughput
Intuitive control interfaces and software
User-friendly and easy to learn
Compact, stand-alone electronics with PC interface
Pioneering cabling technology
Compact construction delivers higher resonance frequencies
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
No backlash or reversal play
Sub-nanometer resolution (0.02 nm)
Integrated coarse and fine displacement in one drive
High operating velocity (up to 1 mm/sec)
Smooth motion