Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, UHV and at low temperatures.
The LT6620 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is designed for large-range high-precision applications in extreme environments.
It is not fitted with positional encoders and is thus the economical alternative to the LT6820 substage for applications where repeatability or automization is not required.
Length: 66 mm
Width: 66 mm
Height: XY = 26 mm, XYZ = 50 mm + 15 mm travel
Weight: XY = 200 g, XYZ = 270 g
Travel: XY = 20 mm, Z = 15 mm
Speed: up to 1 mm/s
Resolution: < 0.02 nm
Encoder repeatability: 100 nm*
Angular deviation (undirectional): < 10 µrad
Load: 500 g
Lift: 200 g
Temperature range: 273 K to 353 K
UHV version: 273 K to 393 K
Lowest pressure: 10⁻⁷ mbar
UHV version: 2 x 10-10 mbar
Substage mounting: 4 x 3.2 mm holes
Sample mounting: 4 x M3 holes
Material: Stainless steel
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Small and practical
Plug-and-play system with modular components
Interfacing solutions for most microscopes
Fast setup and removal
Result-oriented operation and increased throughput
Intuitive control interfaces and software
User-friendly and easy to learn
Compact, stand-alone electronics with PC interface
Pioneering cabling technology
Compact construction delivers higher resonance frequencies
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
No backlash or reversal play
Sub-nanometer resolution (0.02 nm)
Integrated coarse and fine displacement in one drive
High operating velocity (up to 1 mm/sec)
Smooth motion