The SFLT10 substage is fitted with next generation piezo technology. Its primary use is in SEM/FIB, coupled with the Prober Shuttle, where it provides smooth and precise two- or three-dimensional movement of the sample. It's extremely low profile makes it ideal for other uses in tight spots.
Length: 33 mm
Width: 33 mm
Height: 3.5 mm
Travel: XY = 10 mm
Speed: up to 1 mm/s
Resolution: < 0.02 nm
Temperature range: 273 K to 353 K
Lowest pressure: 10⁻⁷ mbar
Substage mounting: 4 x 2 mm holes
Material: Stainless steel
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Small and practical
Plug-and-play system with modular components
Interfacing solutions for most microscopes
Fast setup and removal
Result-oriented operation and increased throughput
Intuitive control interfaces and software
User-friendly and easy to learn
Compact, stand-alone electronics with PC interface
Pioneering cabling technology
Compact construction delivers higher resonance frequencies
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
No backlash or reversal play
Sub-nanometer resolution (0.02 nm)
Integrated coarse and fine displacement in one drive
High operating velocity (up to 1 mm/sec)
Smooth motion